APA (7th ed.) Citation

WasalhKiyotaka & Hayakawa. Handbook of sputter deposition technology: Principles, technology, and applications.

Chicago Style (17th ed.) Citation

WasalhKiyotaka and Hayakawa. Handbook of Sputter Deposition Technology: Principles, Technology, and Applications. New JersylbNoyes publicationslc1992.

MLA (9th ed.) Citation

WasalhKiyotaka and Hayakawa. Handbook of Sputter Deposition Technology: Principles, Technology, and Applications.

Warning: These citations may not always be 100% accurate.