Handbook of sputter deposition technology principles, technology, and applications
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| Format: | Book |
| Published: |
New JersylbNoyes publicationslc1992
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| Call Number : | TS695 W37 1991 |
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| LEADER | 00000pam a2200000 4500 | ||
|---|---|---|---|
| 001 | 10604 | ||
| 003 | MY-KLNDU | ||
| 005 | 20241218055059.0 | ||
| 020 | 0 | 0 | |a 0815512805 |
| 035 | |a 0000013015 | ||
| 039 | 9 | |y 200910081523 |z VLOAD | |
| 090 | 0 | 0 | |a TS695 |b W37 1991 |
| 100 | 1 | 0 | |a WasalhKiyotaka |
| 245 | 1 | 0 | |a Handbook of sputter deposition technology |b principles, technology, and applications |c Kiyotaka Wasa, Shigeru Hayakawa |
| 260 | 0 | 0 | |a New JersylbNoyes publicationslc1992 |
| 300 | |a xii, 304p |b ill |c 25cm | ||
| 500 | 0 | 0 | |a Includes bibliographical references and index |
| 650 | 0 | 0 | |a Cathode sputtering (plating process) |a thin films |
| 700 | 1 | 1 | |a Hayakawa |h Shigeru |y 1925 |
| 999 | |a vtls000010518 |c 10604 |d 10604 | ||