APA (7th ed.) Citation

CampbelllhStephen A. The science and engineering of microelectronic fabrication.

Chicago Style (17th ed.) Citation

CampbelllhStephen A. The Science and Engineering of Microelectronic Fabrication. New YorklbOxford University Presslc1996.

MLA (9th ed.) Citation

CampbelllhStephen A. The Science and Engineering of Microelectronic Fabrication.

Warning: These citations may not always be 100% accurate.