The science and engineering of microelectronic fabrication
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| Main Author: | |
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| Format: | Book |
| Published: |
New YorklbOxford University Presslc1996
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| Series: | Oxford series in electrical engineering
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| Subjects: | |
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| Item Description: | Includes bibliographical referencse and index |
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| Physical Description: | xv, 536p. ill. 24cm |
| ISBN: | 0195105087 |