The science and engineering of microelectronic fabrication
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| Main Author: | |
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| Format: | Book |
| Published: |
New YorklbOxford University Presslc1996
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| Series: | Oxford series in electrical engineering
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| Subjects: | |
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| Call Number : | TK 7871.85 C25 1996 |
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| 090 | 0 | 0 | |a TK 7871.85 |b C25 1996 |
| 100 | 1 | 0 | |a CampbelllhStephen A. |
| 245 | 1 | 4 | |a The science and engineering of microelectronic fabrication |c Stephen A. Campbell |
| 260 | 0 | 0 | |a New YorklbOxford University Presslc1996 |
| 300 | |a xv, 536p. |b ill. |c 24cm | ||
| 440 | 0 | 0 | |a Oxford series in electrical engineering |
| 500 | 0 | 0 | |a Includes bibliographical referencse and index |
| 650 | 0 | 0 | |a Semiconductors |x design and construction |
| 999 | |a vtls000013007 |c 13191 |d 13191 | ||