APA (7th ed.) Citation

lh & Naka. Introduction to VLSI process engineering.

Chicago Style (17th ed.) Citation

lh and Naka. Introduction to VLSI Process Engineering. LondonlbChapman & Halllc1993.

MLA (9th ed.) Citation

lh and Naka. Introduction to VLSI Process Engineering.

Warning: These citations may not always be 100% accurate.