Introduction to VLSI process engineering
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| Format: | Book |
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LondonlbChapman & Halllc1993
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| 100 | 1 | 0 | |a lh |
| 245 | 1 | 0 | |a Introduction to VLSI process engineering |c Edited by Yuji Naka |
| 260 | 0 | 0 | |a LondonlbChapman & Halllc1993 |
| 300 | |a xiii, 210p. |b ill. |c 24cm | ||
| 500 | 0 | 0 | |a Includes index |
| 650 | 0 | 0 | |a Manufacturing processes |
| 650 | 0 | 0 | |a Integrated circuits |x Very large scale integration |x Design and construction |
| 700 | 1 | 1 | |a Naka |h Yuji |
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