APA (7th ed.) Citation

SivaramlhS. Chemical vapor deposition: Thermal and plasma deposition of electronics materials.

Chicago Style (17th ed.) Citation

SivaramlhS. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronics Materials. New YorklbVan Nostrand Reinholdlc1994.

MLA (9th ed.) Citation

SivaramlhS. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronics Materials.

Warning: These citations may not always be 100% accurate.