APA (7th ed.) Citation

Bowen & Tanneer. (2006). X-ray metrology in semiconductor manufacturing. Taylor & Francis.

Chicago Style (17th ed.) Citation

Bowen and Tanneer. X-ray Metrology in Semiconductor Manufacturing. London: Taylor & Francis, 2006.

MLA (9th ed.) Citation

Bowen and Tanneer. X-ray Metrology in Semiconductor Manufacturing. Taylor & Francis, 2006.

Warning: These citations may not always be 100% accurate.