X-ray metrology in semiconductor manufacturing

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Bibliographic Details
Main Author:	Bowen
Other Authors:	Tanneer
Format:	Book
Published:	London Taylor & Francis 2006
Subjects:	Semiconductors > design and construction > quality control Integrated circuits > measurement Semiconductor wafers > inspection X-Rays > diffraction Fluoroscopy
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300			\|a 279p. \|b ill. \|c 23cm
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