Scientific wet process technology for innovative LSI/FPD manufacturing
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| Format: | Book |
| Published: |
London
Taylor & Francis
2006
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| Call Number : | TK 7871.85 S3965 2006 |
MARC
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| 090 | 0 | 0 | |a TK 7871.85 |b S3965 2006 |
| 245 | 1 | 0 | |a Scientific wet process technology for innovative LSI/FPD manufacturing |c edited by Tadahiro Ohmi |
| 260 | 0 | 0 | |a London |b Taylor & Francis |c 2006 |
| 300 | |a 386p. |b ill. |c 26cm | ||
| 500 | 0 | 0 | |a Includes bibliographical references and index |
| 650 | 0 | 0 | |a Semiconductors |x design and construction |
| 650 | 0 | 0 | |a Integrated circuits |x Design and construction |
| 650 | 0 | 0 | |a Semiconductors |x cleaning |
| 700 | 1 | 1 | |a Ohmi |h Tadahiro |
| 999 | |a vtls000030889 |c 20867 |d 20867 | ||