Tribology in chemical-mechanical planarization
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| Format: | Book |
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London
Taylor & Francis
2004
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| 100 | 1 | 0 | |a Liang |h Hong |
| 245 | 1 | 0 | |a Tribology in chemical-mechanical planarization |c Hong Liang,David R.Craven |
| 260 | 0 | 0 | |a London |b Taylor & Francis |c 2004 |
| 300 | |a 185p. |b ill. |c 23cm | ||
| 500 | 0 | 0 | |a Includes index |
| 650 | 0 | 0 | |a Grinding and polishing |
| 650 | 0 | 0 | |a Tribology |
| 700 | 1 | 1 | |a Craven |h David R. |
| 999 | |a vtls000030998 |c 21237 |d 21237 | ||