Micromanufacturing and nanotechnology
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate...
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| Format: | Book |
| Language: | English |
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Berlin
Springer
2006
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Table of Contents:
- 1. Introduction
- 2. Principles of MEMS and MOEMS
- 3. Laser Technology in Micromanufacturing
- 4. Soft Geometrical Error Compensation Methods Using Laser Interferometer
- 5. Characterising Etching Process in Bulk Micromachining
- 6. Features of Surface Micromachining and Wafer Bonding Process
- 7. Micromanufacturing for Document Security: Optically Variable Device
- 8. Nanofinishing Techniques
- 9. Micro and Nanotechnology Applications for Space Micropropulsion
- 10. Carbon Nanotube Production and Applications: Basis of Nanotechnology