Handbook of photomask manufacturing technology
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| Format: | Book |
|---|---|
| Published: |
Boca Raton
Taylor & Francis
2005
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| Subjects: | |
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| LEADER | 00000pam a2200000 4500 | ||
|---|---|---|---|
| 001 | 22839 | ||
| 003 | MY-KLNDU | ||
| 005 | 20241218081047.0 | ||
| 020 | 0 | 0 | |a 0824753747 |
| 035 | |a 0000027818 | ||
| 039 | 9 | |y 200910091724 |z VLOAD | |
| 090 | 0 | 0 | |a TK 7872.M3 |b H36 2005 |
| 245 | 1 | 0 | |a Handbook of photomask manufacturing technology |c edited by Syed Rizvi |
| 260 | 0 | 0 | |a Boca Raton |b Taylor & Francis |c 2005 |
| 300 | |a xxiii, 704p. |b ill. |c 26cm | ||
| 500 | 0 | 0 | |a Includes bibliographical references and index |
| 650 | 0 | 0 | |a Masks (Electronics) |x Handbooks, manuals, etc |
| 999 | |a vtls000032901 |c 22839 |d 22839 | ||