MEMS/MOEMS packaging concepts, designs, materials, and processes
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| Main Author: | |
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| Format: | Book |
| Published: |
New York
McGraw-Hill
2005
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| Series: | McGraw-Hill nano
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| Subjects: | |
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| Item Description: | Includes bibliographical references and index |
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| Physical Description: | xiii, 220p. ill. 24cm |
| ISBN: | 0071455566 |