MEMS/MOEMS packaging concepts, designs, materials, and processes
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| Main Author: | |
|---|---|
| Format: | Book |
| Published: |
New York
McGraw-Hill
2005
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| Series: | McGraw-Hill nano
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| Subjects: | |
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| Call Number : | TK 7870.15 G55 2005 |
MARC
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| 090 | 0 | 0 | |a TK 7870.15 |b G55 2005 |
| 100 | 1 | 0 | |a Gilleo |h Ken |
| 245 | 1 | 0 | |a MEMS/MOEMS packaging |b concepts, designs, materials, and processes |c Ken Gilleo |
| 260 | 0 | 0 | |a New York |b McGraw-Hill |c 2005 |
| 300 | |a xiii, 220p. |b ill. |c 24cm | ||
| 440 | 0 | 0 | |a McGraw-Hill nano |
| 500 | 0 | 0 | |a Includes bibliographical references and index |
| 591 | |a 0000010509 |b 24/06/09 |c 0200-07 |d 1 |e RM585.09 |f 1 |g 585.09 |h YUHA Associates Sdn.Bhd | ||
| 592 | |a 079035 |b 01/07/09 |c RM585.09 |d 1 |e 585.09 | ||
| 650 | 0 | 0 | |a Microelectronic packaging |
| 650 | 0 | 0 | |a Optoelectronic devices |
| 650 | 0 | 0 | |a Microelectronicmechanical systems |
| 999 | |a vtls000032841 |c 22946 |d 22946 | ||