Microfabrication and nanomanufacturing
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| Other Authors: | |
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| Format: | Book |
| Published: |
Boca Raton, FL
CRC/Taylor & Francis
2006.
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| Subjects: | |
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| Physical Description: | 401p. ill. 27cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780824724313 (Hardcover) 0824724313 (Hardcover) |