Microfabrication and nanomanufacturing
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| Format: | Book |
| Published: |
Boca Raton, FL
CRC/Taylor & Francis
2006.
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| 020 | 0 | 0 | |a 9780824724313 (Hardcover) |
| 020 | 0 | 0 | |a 0824724313 (Hardcover) |
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| 090 | 0 | 0 | |a TK7836 |b .M523 2006 |
| 245 | 0 | 0 | |a Microfabrication and nanomanufacturing |c edited by Mark J. Jackson |
| 260 | 0 | 0 | |a Boca Raton, FL |b CRC/Taylor & Francis |c 2006. |
| 300 | |a 401p. |b ill. |c 27cm. | ||
| 504 | 0 | 0 | |a Includes bibliographical references and index. |
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| 592 | |a IN 03876 |b 02/03/09 |c RM581.08 |d 2 |e 1162.16 | ||
| 650 | 0 | 0 | |a Microelectronics. |
| 650 | 0 | 0 | |a Integrated circuits |x Design and construction. |
| 650 | 0 | 0 | |a Microelectromechanical systems |x design and construction. |
| 700 | 1 | 1 | |a Jackson |h Mark J. |
| 999 | |a vtls000035503 |c 26009 |d 26009 | ||