APA (7th ed.) Citation

Sedky. (2006). Post-processing techniques for integrated MEMS. Artech house.

Chicago Style (17th ed.) Citation

Sedky. Post-processing Techniques for Integrated MEMS. Boston: Artech house, 2006.

MLA (9th ed.) Citation

Sedky. Post-processing Techniques for Integrated MEMS. Artech house, 2006.

Warning: These citations may not always be 100% accurate.