Post-processing techniques for integrated MEMS
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| Main Author: | |
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| Format: | Book |
| Published: |
Boston
Artech house
2006
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| Series: | Microelectromechanical systems series
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| Subjects: | |
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| Physical Description: | xiv, 207p. ill. 24cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9781580539012 1580539017 |