Post-processing techniques for integrated MEMS
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| Main Author: | |
|---|---|
| Format: | Book |
| Published: |
Boston
Artech house
2006
|
| Series: | Microelectromechanical systems series
|
| Subjects: | |
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| 100 | 1 | 0 | |a Sedky |h Sherif |
| 245 | 1 | 0 | |a Post-processing techniques for integrated MEMS |c Sherif Sedky |
| 260 | 0 | 0 | |a Boston |b Artech house |c 2006 |
| 300 | |a xiv, 207p. |b ill. |c 24cm | ||
| 440 | 0 | 0 | |a Microelectromechanical systems series |
| 504 | 0 | 0 | |a Includes bibliographical references and index |
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| 650 | 0 | 0 | |a Microelectromechanical systems |
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