MEMS mechanical sensors
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| Other Authors: | |
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| Format: | Book |
| Published: |
Boston
Artech house
c2004
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| Series: | Artech House microelectromechanical system series
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| Subjects: | |
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| Physical Description: | x, 269p. ill. 27cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9781580535366 1580535364 |