MEMS mechanical sensors
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| Other Authors: | |
|---|---|
| Format: | Book |
| Published: |
Boston
Artech house
c2004
|
| Series: | Artech House microelectromechanical system series
|
| Subjects: | |
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| Call Number : | TK7875 .M4537 2004 |
MARC
| LEADER | 00000pam a2200000 4500 | ||
|---|---|---|---|
| 001 | 26092 | ||
| 003 | MY-KLNDU | ||
| 005 | 20241218081938.0 | ||
| 020 | 0 | 0 | |a 9781580535366 |
| 020 | 0 | 0 | |a 1580535364 |
| 035 | |a 0000034679 | ||
| 039 | 9 | |a 200911181342 |b VLOAD |c 200911181156 |d VLOAD |y 200910091749 |z VLOAD | |
| 090 | 0 | 0 | |a TK7875 |b .M4537 2004 |
| 245 | 0 | 0 | |a MEMS mechanical sensors |c Stephen Beeby...[et al.] |
| 260 | 0 | 0 | |a Boston |b Artech house |c c2004 |
| 300 | |a x, 269p. |b ill. |c 27cm | ||
| 490 | 0 | 0 | |a Artech House microelectromechanical system series |
| 504 | 0 | 0 | |a Includes bibliographical references and index |
| 591 | |a 0000005367 |b 12/11/08 |c 0328-08 |d 2 |e RM468.16 |f 1 |g 468.16 |h INTRABAKTI SD.BHD. | ||
| 592 | |a IN 03876 |b 02/03/09 |c RM565.75 |d 2 |e 1131.5 | ||
| 650 | 0 | 0 | |a Microelectromechanical systems |
| 650 | 0 | 0 | |a Detectors |
| 700 | 1 | 1 | |a Beeby |h Stephen |
| 999 | |a vtls000035546 |c 26092 |d 26092 | ||