An introduction to microelectromechanical systems engineering
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| Main Author: | |
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| Format: | Book |
| Published: |
Boston
Artech house
2004
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| Edition: | 2nd ed |
| Series: | Microelectromechanical systems series
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| Subjects: | |
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| Item Description: | Includes bibliographical references and index |
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| Physical Description: | xx,283p. ill. 26cm |
| ISBN: | 9781580535908(hbk) 1580535909(hbk) |