An introduction to microelectromechanical systems engineering
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| Main Author: | |
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| Format: | Book |
| Published: |
Boston
Artech house
2004
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| Edition: | 2nd ed |
| Series: | Microelectromechanical systems series
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| Subjects: | |
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| Call Number : | TK7875 .M35 2004 |
MARC
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| 100 | 1 | 0 | |a Maluf |h Nadim |
| 245 | 1 | 3 | |a An introduction to microelectromechanical systems engineering |c Nadim Maluf, Kirt Williams |
| 250 | 0 | 0 | |a 2nd ed |
| 260 | 0 | 0 | |a Boston |b Artech house |c 2004 |
| 300 | |a xx,283p. |b ill. |c 26cm | ||
| 440 | 0 | 0 | |a Microelectromechanical systems series |
| 500 | 0 | 0 | |a Includes bibliographical references and index |
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| 592 | |a IN 03876 |b 02/03/09 |c RM439.46 |d 2 |e 878.92 | ||
| 650 | 0 | 0 | |a Microelectromechanical systems |
| 700 | 1 | 1 | |a Williams |h Kirt |
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