Photonic MEMS devices design, fabrication and control
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL
CRC Press
c2009
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| Series: | Optical science and engineering series
136 |
| Subjects: | |
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| Physical Description: | 483 p. ill. 27 cm. |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9781420045680 |