Photonic MEMS devices design, fabrication and control

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Bibliographic Details
Main Author:	Liu, Ai-Qun
Format:	Book
Language:	English
Published:	Boca Raton, FL CRC Press c2009
Series:	Optical science and engineering series 136
Subjects:	Microelectromechanical systems Photonics
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020			\|a 9781420045680
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100	1		\|a Liu, Ai-Qun
245	1	0	\|a Photonic MEMS devices \|b design, fabrication and control \|c Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]
260			\|a Boca Raton, FL \|b CRC Press \|c c2009
300			\|a 483 p. \|b ill. \|c 27 cm.
490	1		\|a Optical science and engineering series \|v 136
504			\|a Includes bibliographical references and index
591			\|a 0000010166 \|b 11/06/09 \|c 0200-07 \|d 1 \|e RM459.2 \|f 1 \|g 459.2 \|h Harmoni Publications & Distributors Sdn. Bhd.
592			\|a 05795 \|b 31/05/2010 \|c RM411.64 \|h Harmoni Publications & Distributors Sdn. Bhd.
650		0	\|a Microelectromechanical systems
650		0	\|a Photonics
830		0	\|a Optical science and engineering series \|v 136
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