Handbook of semiconductor manufacturing technology

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Bibliographic Details
Other Authors:	Doering 1946-, Nishi 1940-
Format:	Book
Published:	Boca Raton CRC Press c2008
Edition:	2nd ed
Subjects:	Semiconductors > Design and construction > Handbooks, manuals, etc Semiconductor industry > Handbooks, manuals, etc
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Description
Physical Description:	Varoius pagings ill. 27cm
Bibliography:	Includes bibliographical references and index
ISBN:	9781574446753(hbk) 1574446754(hbk)

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