Handbook of semiconductor manufacturing technology

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Bibliographic Details
Other Authors: Doering 1946-, Nishi 1940-
Format: Book
Published: Boca Raton CRC Press c2008
Edition:2nd ed
Subjects:
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245 0 0 |a Handbook of semiconductor manufacturing technology  |c edited by Robert Doering, Yoshio Nishi 
250 0 0 |a 2nd ed 
260 0 0 |a Boca Raton  |b CRC Press  |c c2008 
300 |a Varoius pagings  |b ill.  |c 27cm 
504 0 0 |a Includes bibliographical references and index 
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650 0 0 |a Semiconductors  |x Design and construction  |x Handbooks, manuals, etc 
650 0 0 |a Semiconductor industry  |x Handbooks, manuals, etc 
700 1 1 |a Doering  |h Robert  |c 1946- 
700 1 1 |a Nishi  |h Yoshio  |d 1940- 
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