Mems technology and devices Suntec, Singapore, 1-6 July 2007

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Bibliographic Details
Other Authors:	Liu, Aiqun
Format:	Book
Language:	English
Published:	Singapore Hackensack, NJ Pan Stanford Pub. distributed by World Scientific Pub. Co c2007
Subjects:	Microelectromechanical systems > congresses Nanosructured materials > congresses
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245	0	0	\|a Mems technology and devices \|b Suntec, Singapore, 1-6 July 2007 \|c Aiqun Liu...[et al.]
260			\|a Singapore \|b Pan Stanford Pub. \|a Hackensack, NJ \|b distributed by World Scientific Pub. Co \|c c2007
300			\|a xv,441p. \|b ill. \|c 24cm + \|e 1 CD-ROM (4 3/4 in.)
500			\|a "ICMAT 2007 conference proceedings"--T.p. verso
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504			\|a Includes bibliographical references
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