Principles of growth and processing of semiconductors
Developing the essential elements of semiconductor behaviour, this text goes on to provide a conceptual framework and introduction to microelectronics. Topics include semiconductors, devices, defects, evaluation, bulk growth, epitaxial growth, oxidation, diffussion, and ion implantation.
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Boston
WCB/McGraw-Hill
1999
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| Series: | McGraw-Hill series in materials science and engineering
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| Subjects: | |
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| 100 | 1 | |a Mahajan, Subhash | |
| 245 | 1 | 0 | |a Principles of growth and processing of semiconductors |c S. Mahajan, K.S. Sree Harsha |
| 260 | |a Boston |b WCB/McGraw-Hill |c 1999 | ||
| 300 | |a xv,512 p. |b ill. |c 25.cm | ||
| 490 | 1 | |a McGraw-Hill series in materials science and engineering | |
| 504 | |a Includes bibliographical references and index | ||
| 505 | 0 | |a 1. Semiconductors: An Introduction -- 2. Principles of Semiconducting Devices -- 3. Defects -- 4. Evaluation of Semiconductors -- 5. Growth of Bulk Crystals -- 6. Expitaxial Growth -- 7. Oxidation -- 8. Diffusion -- 9. Ion Implantation -- 10. Metallization -- 11. Lithography and Etching -- 12. Challenges in Growth and Processing of Semiconductors. | |
| 520 | |a Developing the essential elements of semiconductor behaviour, this text goes on to provide a conceptual framework and introduction to microelectronics. Topics include semiconductors, devices, defects, evaluation, bulk growth, epitaxial growth, oxidation, diffussion, and ion implantation. | ||
| 650 | 0 | |a Semiconductors |x design and construction | |
| 700 | 1 | |a SreeHarsha, K. S. | |
| 830 | 0 | |a McGraw-Hill series in materials science and engineering | |
| 999 | |a vtls000002774 |c 3311 |d 3311 | ||