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Principles of growth and processing of semiconductors

Developing the essential elements of semiconductor behaviour, this text goes on to provide a conceptual framework and introduction to microelectronics. Topics include semiconductors, devices, defects, evaluation, bulk growth, epitaxial growth, oxidation, diffussion, and ion implantation.

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Bibliographic Details
Main Author: Mahajan, Subhash
Other Authors: SreeHarsha, K. S.
Format: Book
Language:English
Published: Boston WCB/McGraw-Hill 1999
Series:McGraw-Hill series in materials science and engineering
Subjects:
Semiconductors > design and construction
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