Principles of growth and processing of semiconductors
Developing the essential elements of semiconductor behaviour, this text goes on to provide a conceptual framework and introduction to microelectronics. Topics include semiconductors, devices, defects, evaluation, bulk growth, epitaxial growth, oxidation, diffussion, and ion implantation.
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| Format: | Book |
| Language: | English |
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Boston
WCB/McGraw-Hill
1999
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| Series: | McGraw-Hill series in materials science and engineering
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Table of Contents:
- 1. Semiconductors: An Introduction
- 2. Principles of Semiconducting Devices
- 3. Defects
- 4. Evaluation of Semiconductors
- 5. Growth of Bulk Crystals
- 6. Expitaxial Growth
- 7. Oxidation
- 8. Diffusion
- 9. Ion Implantation
- 10. Metallization
- 11. Lithography and Etching
- 12. Challenges in Growth and Processing of Semiconductors.