MEMS design and fabrication
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| Other Authors: | |
|---|---|
| Format: | Book |
| Published: |
London
Taylor & Francis
2005
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| Series: | Mechanical engineering series
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| Subjects: | |
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| Call Number : | TK 7875 M46 2005 |
MARC
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| 090 | 0 | 0 | |a TK 7875 |b M46 2005 |
| 245 | 1 | 0 | |a MEMS |b design and fabrication |c edited by Mohamed Gad-el-Hak |
| 260 | 0 | 0 | |a London |b Taylor & Francis |c 2005 |
| 300 | |a xii,v.p. |c 25cm | ||
| 440 | 0 | 0 | |a Mechanical engineering series |
| 500 | 0 | 0 | |a Includes index |
| 650 | 0 | 0 | |a Microfabrication systems |
| 650 | 0 | 0 | |a Microelectromechanical systems |x design and construction |
| 650 | 0 | 0 | |a Microfabrication |
| 700 | 1 | 1 | |a Gad-el-Hak |h Mohamed |
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