Microchip fabrication a practical guide to semiconductor processing

Saved in:
Bibliographic Details
Main Author: Van Zant
Format: Book
Published: New York McGraw-Hill 1997
Edition:3rd ed
Subjects:
Tags: Add Tag
No Tags, Be the first to tag this record!

MARC

LEADER 00000pam a2200000 4500
001 37467
003 MY-KLNDU
005 20241218091306.0
020 0 0 |a 0070672504 
035 |a 0000024356 
039 9 |y 200910091626  |z VLOAD 
090 0 0 |a TK 7871.85  |b V36 1997 
100 1 0 |a Van Zant  |h Peter 
245 1 0 |a Microchip fabrication  |b a practical guide to semiconductor processing  |c Peter Van Zant 
250 0 0 |a 3rd ed 
260 0 0 |a New York  |b McGraw-Hill  |c 1997 
300 |a xvi,623p.  |b ill.  |c 24cm 
500 0 0 |a Includes bibilographical references and index 
650 0 0 |a Semiconductors  |x design and construction 
650 0 0 |a Integrated circuits  |x Design and construction 
999 |a vtls000027235  |c 37467  |d 37467