MEMS
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New Delhi
Tata McGraw-Hill
2007
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Table of Contents:
- Mems are small and integrated devices, which combine electronics, electrical as well as mechanical elements to meet the control related functional requirements. This book synergistically covers the aspects of multidisciplinary subjects by providing the proof-of-principle, concepts, design, development and applications of mems.