Handbook of vacuum science and technology

The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum...

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Bibliographic Details
Other Authors: Hoffman, Dorothy M., Singh, Bawa, Thomas, John H.
Format: Book
Language:English
Published: San Diego, CA Academic Press 1998.
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LEADER 00000nam a2200000 a 4500
001 4065
003 MY-KLNDU
005 20241218051557.0
008 s1998 caua bi 000 0 eng d
020 |a 0123520657 (alk. paper) 
020 |a 9780123520654 (alk. paper) 
039 9 |a 201410202047  |b zul  |c 201407181055  |d shahrim  |c 201407181054  |d shahrim  |c 200910081329  |d VLOAD  |y 200910081210  |z VLOAD 
040 |a UPNM 
090 |a TJ 940  |b .H59 1998 
245 0 0 |a Handbook of vacuum science and technology  |c edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III. 
260 |a San Diego, CA  |b Academic Press  |c 1998. 
300 |a xxii, 835 p.  |b ill.  |c 24 cm. 
504 |a Includes bibliographical references and index. 
505 0 |a Fundamentals of vacuum technology and surface physics -- Creation of vacuum -- Vacuum measurements -- Systems design and components -- Vacuum applications -- Large-scale vacuum-based processes. 
520 |a The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. 
650 0 |a Vacuum technology  |v Handbooks, manuals, etc. 
700 1 |a Hoffman, Dorothy M. 
700 1 |a Singh, Bawa. 
700 1 |a Thomas, John H. 
999 |a vtls000003660  |c 4065  |d 4065