Handbook of vacuum science and technology
The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum...
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
San Diego, CA
Academic Press
1998.
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| 003 | MY-KLNDU | ||
| 005 | 20241218051557.0 | ||
| 008 | s1998 caua bi 000 0 eng d | ||
| 020 | |a 0123520657 (alk. paper) | ||
| 020 | |a 9780123520654 (alk. paper) | ||
| 039 | 9 | |a 201410202047 |b zul |c 201407181055 |d shahrim |c 201407181054 |d shahrim |c 200910081329 |d VLOAD |y 200910081210 |z VLOAD | |
| 040 | |a UPNM | ||
| 090 | |a TJ 940 |b .H59 1998 | ||
| 245 | 0 | 0 | |a Handbook of vacuum science and technology |c edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III. |
| 260 | |a San Diego, CA |b Academic Press |c 1998. | ||
| 300 | |a xxii, 835 p. |b ill. |c 24 cm. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a Fundamentals of vacuum technology and surface physics -- Creation of vacuum -- Vacuum measurements -- Systems design and components -- Vacuum applications -- Large-scale vacuum-based processes. | |
| 520 | |a The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. | ||
| 650 | 0 | |a Vacuum technology |v Handbooks, manuals, etc. | |
| 700 | 1 | |a Hoffman, Dorothy M. | |
| 700 | 1 | |a Singh, Bawa. | |
| 700 | 1 | |a Thomas, John H. | |
| 999 | |a vtls000003660 |c 4065 |d 4065 | ||


