Handbook of vacuum science and technology
The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum...
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
San Diego, CA
Academic Press
1998.
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Table of Contents:
- Fundamentals of vacuum technology and surface physics
- Creation of vacuum
- Vacuum measurements
- Systems design and components
- Vacuum applications
- Large-scale vacuum-based processes.