Cold plasma in materials fabrication from fundamentals to applications
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Piscataway, NJ New York
IEEE Press ; Institute of Electrical and Electronics Engineers
1994.
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| Subjects: | |
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| 003 | MY-KLNDU | ||
| 005 | 20241218050540.0 | ||
| 008 | s1994 xxua bi 001 0 eng | ||
| 010 | |a 93-042135 | ||
| 020 | |a 0780310551 | ||
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| 040 | |a UPNM | ||
| 090 | |a TA 2020 |b .G75 1994 | ||
| 100 | 1 | |a Grill, Alfred. | |
| 245 | 1 | 0 | |a Cold plasma in materials fabrication |b from fundamentals to applications |c Alfred Grill. |
| 260 | |a Piscataway, NJ |b IEEE Press ; |a New York |b Institute of Electrical and Electronics Engineers |c 1994. | ||
| 300 | |a xiii, 257 p. |b ill. |c 24 cm. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Plasma engineering. | |
| 650 | 0 | |a Low temperature plasmas. | |
| 650 | 0 | |a Manufacturing processes. | |
| 999 | |a vtls000000121 |c 41 |d 41 | ||