Advanced Ta-based diffusion barriers for Cu interconnects
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York :
Nova Science Publishers,
c2009.
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| Subjects: | |
| Online Access: | NetLibrary |
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| Item Description: | Description based on print version record. |
|---|---|
| Physical Description: | 1 online resource (93 p.) : ill. |
| Bibliography: | Includes bibliographical references (p. [73]-86) and index. |
| ISBN: | 9781607416753 (electronic bk.) 1607416751 (electronic bk.) |