MEMS and microsystems design, manufacture, and nanoscale engineering
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Hoboken, N.J.
John Wiley
c2008.
|
| Edition: | 2nd ed. |
| Subjects: | |
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| 003 | MY-KLNDU | ||
| 005 | 20241219004736.0 | ||
| 008 | 120224s2008 xxu | 000 0 eng d | ||
| 010 | |a 2007-017041 | ||
| 020 | |a 9780470083017(cloth) | ||
| 020 | |a 0470083018 (cloth) | ||
| 039 | 9 | |a 201202240954 |b sani |c 201202240951 |d sani |y 201202240940 |z sani | |
| 040 | |a DLC | ||
| 090 | |a TK7874 |b .H794 2008 | ||
| 100 | 1 | |a Hsu, Tai-Ran | |
| 245 | 1 | 0 | |a MEMS and microsystems |b design, manufacture, and nanoscale engineering |c Tai-Ran Hsu |
| 250 | |a 2nd ed. | ||
| 260 | |a Hoboken, N.J. |b John Wiley |c c2008. | ||
| 300 | |a xxv, 550 p. : |b ill. ; |c 25 cm | ||
| 504 | |a Includes bibliographical references (p. 509-521) and index | ||
| 650 | 0 | |a Microelectronics | |
| 650 | 0 | |a Microelectromechanical systems | |
| 650 | 0 | |a Microelectronic packaging | |
| 999 | |a vtls000046491 |c 45876 |d 45876 | ||