Micromanufacturing processes

In addition to covering all processes in a single source, Micromanufacturing Processes also deals with various aspects of micromanufacturing. This book presents the principles, basic micro tools, and developments in micromanufacturing processes and systems. It also includes measurement techniques as...

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Bibliographic Details
Other Authors: Jain, V. K. (Vijay Kumar) 1948
Format: Book
Language:English
Published: Boca Raton, FL Taylor & Francis 2013
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245 0 0 |a Micromanufacturing processes  |c edited by V.K. Jain 
260 |a Boca Raton, FL  |b Taylor & Francis  |c 2013 
300 |a xvii, 411 p.  |b ill.  |c 26 cm. 
504 |a Includes bibliographical references and index 
505 |a Section I Introduction -- 1. Micromanufacturing: An Introduction -- 2. Challenges in Meso-, Micro-, and Nanomanufacturing -- Section II Micromachining -- Traditional Micromachining -- 3. Microturning -- 4. Microgrinding -- Advanced Micromachining -- 5. Biomachining -- Acidithiobacillus-Genus-Based Metal Removal -- 6. Micro-and Nanomanufacturing by Focused Ion Beam -- Section III Nanofinishing -- 7. Magnetorheological and Allied Finishing Processes -- 8. Magnetic Abrasive Finishing (MAF) -- 9. Abrasive Flow Finishing (AFF) for Micromanufacturing -- Section IV Microjoining -- 10. Laser Microwelding -- 11. Electron Beams for Macro- and Microwelding Applications -- Section V Microforming -- 12. Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting -- 13. Microextrusion -- 14. Microbending with Laser -- Section VI Miscellaneous -- 15. Dimensional Metrology for Micro/Mesoscale Manufacturing -- 16. Micromolding - A Soft Lithography Technique -- 17. Fabrication of Microelectronic Devices -- 18. An Integrated Wafer Surface Evolution Model for Chemical Mechanical Planarization (CMP) 
520 |a In addition to covering all processes in a single source, Micromanufacturing Processes also deals with various aspects of micromanufacturing. This book presents the principles, basic micro tools, and developments in micromanufacturing processes and systems. It also includes measurement techniques as well as research trends. Ideal as a reference for researchers or for undergraduate students, the text addresses several different types of micromanufacturing processes, such as micromachining, microforming, microcasting, microjoining, nanofinishing, and micrometrology. Figures and technical data illustrate the processes and concepts that are discussed by the author. 
592 |a 9250  |b 20/8/2013  |c RM 393.03  |h RIMA 
650 0 |a Micromachining 
650 0 |a Manufacturing processes 
700 1 |a Jain, V. K.  |q (Vijay Kumar)  |d 1948 
999 |a vtls000049194  |c 48653  |d 48653