Micromanufacturing processes
In addition to covering all processes in a single source, Micromanufacturing Processes also deals with various aspects of micromanufacturing. This book presents the principles, basic micro tools, and developments in micromanufacturing processes and systems. It also includes measurement techniques as...
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| Language: | English |
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Boca Raton, FL
Taylor & Francis
2013
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Table of Contents:
- Section I Introduction
- 1. Micromanufacturing: An Introduction
- 2. Challenges in Meso-, Micro-, and Nanomanufacturing
- Section II Micromachining
- Traditional Micromachining
- 3. Microturning
- 4. Microgrinding
- Advanced Micromachining
- 5. Biomachining
- Acidithiobacillus-Genus-Based Metal Removal
- 6. Micro-and Nanomanufacturing by Focused Ion Beam
- Section III Nanofinishing
- 7. Magnetorheological and Allied Finishing Processes
- 8. Magnetic Abrasive Finishing (MAF)
- 9. Abrasive Flow Finishing (AFF) for Micromanufacturing
- Section IV Microjoining
- 10. Laser Microwelding
- 11. Electron Beams for Macro- and Microwelding Applications
- Section V Microforming
- 12. Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting
- 13. Microextrusion
- 14. Microbending with Laser
- Section VI Miscellaneous
- 15. Dimensional Metrology for Micro/Mesoscale Manufacturing
- 16. Micromolding - A Soft Lithography Technique
- 17. Fabrication of Microelectronic Devices
- 18. An Integrated Wafer Surface Evolution Model for Chemical Mechanical Planarization (CMP)