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Handbook of thin film deposition techniques, processes, and technologies

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The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory...

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Bibliographic Details
Other Authors: Seshan, Krishna
Format: Book
Language:English
Published: Amsterdam ; Boston Waltham Elsevier ; William Andrew 2012.
Edition:3rd ed.
Subjects:
Thin films.
Thin film devices > design and construction.
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