Handbook of thin film deposition techniques, processes, and technologies
The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory...
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| Format: | Book |
| Language: | English |
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Amsterdam ; Boston Waltham
Elsevier ; William Andrew
2012.
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| Edition: | 3rd ed. |
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