A guide to hands-on MEMS design and prototyping
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabricat...
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| Format: | Book |
| Language: | English |
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Cambridge, UK
Cambridge University Press
2011
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Table of Contents:
- 1. Introduction;
- 2. Micromechanics;
- 3. Electrostatic Actuation;
- 4. Optical MEMS;
- 5. Thermal MEMS;
- 6. Fluidic MEMS;
- 7. Package and Test;
- 8. From Prototype to Product: MEMS Deformable Mirrors for Adaptive Optics.