Optical metrology
Modern sources of radiation, modulators, beam scanners, photo detectors and computer-assisted detection, and display of information have contributed to the growing interest in the use of optical technology to solve a wide variety of measurement problems. This self-contained book presents in-depth co...
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Chichester, UK
John Wiley & Sons
1995
|
| Edition: | 2nd ed. |
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | Modern sources of radiation, modulators, beam scanners, photo detectors and computer-assisted detection, and display of information have contributed to the growing interest in the use of optical technology to solve a wide variety of measurement problems. This self-contained book presents in-depth coverage of the fundamental theory and practical applications of optical metrology. |
|---|---|
| Physical Description: | [ix], 321 p. ill. 25 cm. |
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0471954748 |