Optical metrology

Modern sources of radiation, modulators, beam scanners, photo detectors and computer-assisted detection, and display of information have contributed to the growing interest in the use of optical technology to solve a wide variety of measurement problems. This self-contained book presents in-depth co...

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Bibliographic Details
Main Author: Gasvik, Kjell J.
Format: Book
Language:English
Published: Chichester, UK John Wiley & Sons 1995
Edition:2nd ed.
Subjects:
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Call Number :QC 367 .G37 1995

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040 |a UPNM 
090 |a QC 367  |b .G37 1995 
100 1 |a Gasvik, Kjell J. 
245 1 0 |a Optical metrology  |c Kjell J. Gasvik 
250 |a 2nd ed. 
260 |a Chichester, UK  |b John Wiley & Sons  |c 1995 
300 |a [ix], 321 p.  |b ill.  |c 25 cm. 
504 |a Includes bibliographical references and index 
505 |a Basics -- Gaussian Optics -- Interference -- Diffraction -- Light Sources and Detectors -- Holography -- Moire Methods -- Speckle Methods -- Photoelasticity and Polarized Light -- Digital Image Processing -- Fringe Analysis -- Some Other Optical Metrology Techniques 
520 |a Modern sources of radiation, modulators, beam scanners, photo detectors and computer-assisted detection, and display of information have contributed to the growing interest in the use of optical technology to solve a wide variety of measurement problems. This self-contained book presents in-depth coverage of the fundamental theory and practical applications of optical metrology. 
650 0 |a Optical measurements 
999 |a vtls000051406  |c 50572  |d 50572