Optical metrology

Modern sources of radiation, modulators, beam scanners, photo detectors and computer-assisted detection, and display of information have contributed to the growing interest in the use of optical technology to solve a wide variety of measurement problems. This self-contained book presents in-depth co...

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Bibliographic Details
Main Author: Gasvik, Kjell J.
Format: Book
Language:English
Published: Chichester, UK John Wiley & Sons 1995
Edition:2nd ed.
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