Ultraclean technology handbook
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int...
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York
Marcel Dekker
1993
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| Summary: | Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int. |
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| Physical Description: | v. <1 > ill. 26 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0824787536 (v. 1 : acid-free paper) |